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Picosun Atomic Layer Deposition
Dual chamber hot wall reactors for both R&D and production
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Solmates Pulsed Laser Deposition
Solmates’ advanced PLD equipment gives a leading edge for the entry of new processes into commercial products. PLD will play a key role in the development of future chip designs and the integration of new materials.
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SSI Rapid Thermal Processing
Solaris 100,150, 200 for small pieces to 200mm substrates
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Plasma Process Systems
RIE, ICP, Plasma Etch, PECVD, CVD and Barrel Etchers
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